超薄板製品の三次元溶接技術の開発

機械金属部 舟田義則 廣崎憲一 中島明哉

 半導体製造産業や電子機器産業,精密機械産業などでは,製造に微細または極薄な部材を溶接することを必要とする製品や部品が多い。そこで,半導体レーザによる超薄板溶接技術の確立を目指し,その実用性を検証するため,全6軸多軸位置決め装置と半導体レーザからなる三次元溶接システムを試作した。そして,インコネル718製溶接ベローズ用ダイヤフラムの内周エッジ溶接やSUS304製織機部品の全周溶接を試みた。その結果,ダイヤフラムの内周エッジ溶接では80%以上の確率で微細漏れのない溶接を可能とした。また,織機部品の全周溶接では溶け込みが均一な溶接を可能とし,半導体レーザによる超薄板溶接技術の実用性を示すことができた。
キーワード: 超薄板溶接, 三次元溶接, 半導体レーザ

Development of Three Dimensional Welding Technique for Products Consisting of Thin foils

Yoshinori FUNADA, Kenichi HIROSAKI and Akichika NAKASHIMA

In semi-conductor, electricity and precision machine industries, there are many products needing to weld micro and thin metallic materials. In order to establish the welding process for thin metallic foil with direct diode laser processing, 3D welding system was prepared equipping with the automatically stage with six axis and a diode laser. Using this system, an internal edge welding of inconel 718 diaphragm used as welding bellows and a round edge welding of SUS304 parts used in a textile machine were tried to inspect the practical performance of thin foil welding using direct diode laser. As the results, leakless internal edge welding of inconel 718 was possible with a probability more than 80%. A round welding of SUS304 parts was also successful with a uniform weld bead. From those results, it was concluded that hin foil welding using direct diode laser processing could be applied to the practical products.
Keywords : thin foil welding, three dimensional welding, direct diode laser processing


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