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Research and Development
of Hybrid Pulse Plasma Coating
(HPPC) System
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Kaoru AWAZU, Haruyuki YASUI, Noriyuki SAKUDO, Eiji SAJI, Yuushi
HASEGAWA
Takeshi HITOBO, Noriaki IKENAGA, Takayuki SATO, Yukio NAMBO and
Kazuo SAITOH
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A project team of this R & D work comprises the researchers from one
university and three institutes, and the engineers of five enterprises
in a Hokuriku district, by which a goal of this work was achieved. Obtained
results are as follows:
| (1) |
Hybrid pulse plasma coating (HPPC) system is
constructed which consisted all pulse control system with gases
pulse introduction, pulse plasma generation, pulse high-voltage
application. Uniform plasma was found to be generated over in a
large chamber (1m3) by absorption of RF and microwave. |
| (2) |
In order to examine the uniformity of coating
films of diamond like carbon (DLC), DLC films were able to coat
at the parts of complex shape (aspect ratio: 〜5). |
| (3) |
DLC films were able to coat at lower temperature
than 200℃ and ceramic films (TiOx and SiOx) were coated at lower
temperature than 150℃ on the organic materials (polyester texture,
PET resin and etc.). |
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Keywords ■■■ |
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hybrid, complex shape, pulse plasma,
coating, DLC film, TiOx film, SiOx film. |
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